Fluorogard® AT Filter
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Applications
- Industry: Semiconductor (wet etch and clean, bulk chemical delivery), Life Sciences (purification), Flat Panel Display (organic layer printing)
- Chemistry: Aggressive acids, aggressive bases, solvents
- Installation: Point of tool, bulk
Specifications
| AT | ATX | ATE | AT3 | ||
|---|---|---|---|---|---|
| Materials: | Membrane: | Hydrophobic PTFE | |||
| Supports, sleeve, end caps, core | PFA | ||||
| Catridge O-ring options | E-FKM, E-ETP, Chemraz®, Kazlrez®, FER | ||||
| Retention rating (see Note 1): | 0.05, 0.1, 0.2, 0.5, 1.0, 5.0, 10.0 µm (See Note 2) | 15, 20 nm, 0.03, 0.05, 0.1 µm UCM option: 15, 20 nm (See Note 2) | 15, 20 nm, 0.03, 0.05, 0.1 µm UCM option: 15, 20 nm (See Note 2) | UCM option: 15 nm | |
| Membrane area: | 4" | 0.36 m² (3.88 ft²) | 0.5 m² (5.38 ft²) | 2.2 m² (23.86 ft²) | |
| 10" | 0.9 m² (9.68 ft²) | 1.3 m² (13.99 ft²) | (15 nm/20nm) 2.1 m² (22.6 ft²) | 2.8 m² (30.14 ft²) | |
| 20" | 1.8 m² (19.38 ft²) | 2.6 m² (27.99 ft²) | 4.4 m² (47.36 ft²) | ||
| 30" | 2.7 m² (29.06 ft²) | ||||
| Particle Cleanliness | ≤ 50 particles/10 mL (≥ 0.05 µm/10 mL) after 5 minutes flushing at 3-5 L/min | ||||
| Metal Extractables: | Cartridge | Standard <40 µg per device | |||
| UCM <10 µg per device | |||||
| Disposable | Standard <10 µg per device | ||||
| UCM <3 µg per device |
| Cartridge | Disposable | Disposable (Tube Type) | ||
|---|---|---|---|---|
| Operating conditions | Maximum operating pressure | 0.58 MPa (5.8 bar, 84 psi) @ 25°C (77°F) | 0.58 MPa (5.8 bar, 84 psi) @ 25°C (77°F) | 0.58 MPa (5.8 bar, 84 psi) @ 25°C (77°F) |
| Maximum forward differential pressure | 0.44 MPa (4.4 bar, 64 psi) @ 25°C (77°F) | 0.44 MPa (4.4 bar, 64 psi) @ 25°C (77°F) | 0.44 MPa (4.4 bar, 64 psi) @ 25°C (77°F) | |
| 0.05 MPa (0.5 bar, 7.5 psi @ 180°C (356°F) | 0.05 MPa (0.5 bar, 7.5 psi @ 180°C (356°F) | 0.05 MPa (0.5 bar, 7.5 psi @ 150°C (302°F) | ||
| Maximum reverse differential pressure | 0.34 MPa (3.45 bar, 50 psi @ 25°C (77°F) | 0.34 MPa (3.45 bar, 50 psi @ 25°C (77°F) | 0.34 MPa (3.45 bar, 50 psi @ 25°C (77°F) | |
| Maximum operating temperature | 180°C (356°F) | 180°C (356°F) | 150°C (302°F) | |
| Flowell™ 60 Series disposable | 100°C (212°F) | |||
| Note 1: Retention ratings of 0.03 µm, 15 nm and 20 nm are used in solvent filtration as a UCM product - no prewet option. Note 2: Prewet options are available between 0.05 µm and 1 µm. Contact your local Entegris representative for your specific product requirements. | ||||
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