InVue® GV148 Concentration Monitors
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Inlet/Outlet Type and Size: For other options not shown here, please contact Entegris.
To order the 19-pin Turck® connector with 4.0 meter (13.12') PVC-jacketed cable accessory, reference part number GV1CBLH04.
To order the USB to 4-wire serial converter, reference part number GV1USBCVT
Software Download
Windows-based interface for user setup, calibration, monitoring and data
System requirements: Windows 7 or 10, 8GB RAM
Current software version InVue GV148HMI-S1004
- H2O2 spiking in slurry
- Slurry dilution
- Proprietary additive blending
- Global and local loop monitoring
- Batch tool chemical blending
- Bath lifetime detection
- Post-CMP clean chemical blending
Specifications
| Dimensions | |||
| Port Connection | A | B | C |
| 1/4" Flaretek tube fitting | 114.6 mm (4.51") | 33.0 mm (1.30") | 111.0 mm (4.37") |
| 3/8" Flaretek tube fitting | 117.7 mm (4.64") | 34.7 mm (1.37") | 113.5 mm (4.47") |
| 1/2" Flaretek tube fitting | 120.9 mm (4.76") | 36.3 mm (1.43") | 119.6 mm (4.71") |
| 3/4" Flaretek tube fitting | 126.6 mm (4.99") | 38.9 mm (1.53") | 132.6 mm (5.22") |
| 1" Flaretek tube fitting | 126.6 mm (4.99") | 38.9 mm (1.53") | 154.9 mm (6.10") |
| 1/2" PrimeLock tube fitting | 120.9 mm (4.76") | 36.3 mm (1.43") | 122.9 mm (4.84") |
| 1" PrimeLock tubing fitting | 126.6 mm (4.99") | 38.9 mm (1.53") | 149.6 mm (5.89") |
| 1/4" Super 300 Type Pillar tube fitting | 114.6 mm (4.51") | 33.0 mm (1.30") | 100.5 mm (3.96") |
| 3/8" Super 300 Type Pillar tube fitting | 117.7 mm (4.64") | 34.7 mm (1.37") | 112.5 mm (4.43") |
| 3/4" Super 300 Type Pillar tube fitting | 126.6 mm (4.99") | 38.9 mm (1.53") | 134.5 mm (5.29") |
| Sensor materials of construction | Flow cell body | Polytetrafluoroethylene (PTFE)* | |
| Optical window | Single-crystal sapphire* | ||
| Cable jacket | Polyvinylchloride (PVC) | ||
| Bonnet, enclosure | Polyvinylidene fluoride (PVDF) | ||
| Mounting plate | Polypropylene (PP) | ||
| Electrical | Cable connection | 19 pin Turck male | |
| Current rating | 1.0 A at start-up; 0.5 A during operation | ||
| Main voltage input | 24 VDC | ||
| IO voltage input | 12 - 24 VDC | ||
| Short protection | Yes | ||
| Extrenal LEDs | 4 | ||
| Analog outputs | 4-20 mA concentration, fluid temperature, refractive index (RI) | ||
| Discrete digital inputs | 2 | ||
| Discrete digital outputs | 2, 80 mAdc maximum (each) | ||
| Re-zero | Digital input, serial command, or MMI software | ||
| Serial communication | RS485 | 2-wire or 4-wire | |
| RS422 | 4-wire | ||
| Operating system compatibility | Windows® 7 or 10 | ||
| Network compatible | Yes | ||
| Pressure and thermal | Maximum pressure | 80 psig at 40°C (104°F) | |
| Process fluid temperature range | 20° to 40°C (68° to 104°F) | ||
| Ambient temperature range | 20° to 35°C (68° to 95°F) | ||
| Storage temperature range | -15° to 40°C (5° to 104°F) | ||
| RI Measurement | RI range** | 1.32 - 1.40 nD | |
| Accuracy | ±2 x 10-4 nD (@ 20°C [68°F] from 1.332987 to 1.4000 nD) | ||
| Repeatability | 5 x 10-5 nD (in clear fluid @ 30°C [86°F]) | ||
| Precision | 3 x 10-6 nD (in DI water (@ 20°C [68°F]) | ||
| Response time | <3 sec unaveraged response to 63% of steady state change | ||
| Drift | <5 x 10-5 nD/30 days @ 30°C (68°F) | ||
| Pressure sensitivity (typical) | 8 x 10-7 nD/psig in DI water @ 20°C (68°F) | ||
| ROHS compliant | Yes | ||
| Enclosure | IP54 | ||
| Orientation | Any | ||
| Software | Windows-based interface for user setup, calibration, monitoring, and data System requirements: Windows 7 or 10, 8GB RAM Current software version InVue GV148HMI-S1004 |
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| *Wetted components **For fluids with a refractive index outside this range, please contact Entegris. |
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Successfully Opted for software Updates
GV148 Window Cleaner Animation
InVue® GV148 Liquid Concentration Monitor Cleaning Port Removal and Reassembly
| Part Number | Inlet/Outlet Type | Inlet and Outlet Size |
|---|---|---|
| GV1MAH0F04NA | Flaretek® tube fitting | 1/4" |
| GV1MAH0F06NA | Flaretek® tube fitting | 3/8" |
| GV1MAH0F08NA | Flaretek® tube fitting | 1/2" |
| GV1MAH0F12NA | Flaretek® tube fitting | 3/4" |
| GV1MAH0F16NA | Flaretek® tube fitting | 1" |
| GV1MAH0K08NA | PrimeLock® tube fitting | 1/2" |
| GV1MAH0K16NA | PrimeLock® tube fitting | 1" |
| GV1MAH0W04NA | Super 300 Type Pillar® tube fitting | 1/4" |
| GV1MAH0W06NA | Super 300 Type Pillar® tube fitting | 3/8" |
| GV1MAH0W12NA | Super 300 Type Pillar® tube fitting | 3/4" |
Inlet/Outlet Type and Size: For other options not shown here, please contact Entegris.
To order the 19-pin Turck® connector with 4.0 meter (13.12') PVC-jacketed cable accessory, reference part number GV1CBLH04.
To order the USB to 4-wire serial converter, reference part number GV1USBCVT
Software Download
Windows-based interface for user setup, calibration, monitoring and data
System requirements: Windows 7 or 10, 8GB RAM
Current software version InVue GV148HMI-S1004