Savana® AT Filter
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Reference Materials
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Applications
- Aggressive acid and base, point-of-tool filtration
- Bulk chemical delivery and wet etch and clean semiconductor applications
- Purification life sciences applications
- Bulk chemical flat panel display applications
- Substrate - Ni-P plating and magnetic head - wet etch and clean data storage applications
- LED applications
Specifications
| Materials: | Membrane | PTFE |
| Support | PFA | |
| O-ring | Encapsulated FKM (E-FKM) | |
| Retention rating: | 0.05, 0.1, 0.2, 0.5, 1, 5, 10 µm | |
| Shelf life (prewet option): | 1 year | |
| Membrane area: | 4" | 0.23 m2 (2.48 ft2) |
| 10" | 0.8 m2 (8.61 ft2) | |
| 20" | 1.6 m2 (17.22 ft2) | |
| 30" | 2.4 m2 (25.83 ft2) | |
| Maximum operating conditions: | Maximum forward differential pressure | 0.51 MPa (5.1 bar, 74 psi) @ 25°C (77°F) |
| Maximum reverse differential pressure | 0.35 MPa (3.5 bar, 50 psi) @ 25°C (77°F) | |
| Maximum operating temperature | 120°C (248°F) at the above conditions | |
| Notes: | Prewet filters are enclosed in bag filled with DI water and 1% H202. Drain and flush with 20 liters of DI water (per 10”) after installing filter. Savana® AT can be sterilized by autoclaving up to 50 cycles at 125°C or sterilized by steam-in-place up to 50 cycles at 135°C for 30 minutes at less than 0.3 bar differential pressure. | |
Successfully Opted for software Updates
Part Numbers
| Part Number | Chemlock® Key | Prewet | Length | Retention Rating |
|---|---|---|---|---|
| SVTA01TQ1 | No | No | 10" | 1 µm |
| SVTA01TQ1K | Yes | No | 10" | 1 µm |
| SVTA01TQ1KPW | Yes | Yes | 10" | 1 µm |
| SVTA02TQ1 | No | No | 20" | 1 µm |
| SVTA02TQ1K | Yes | No | 20" | 1 µm |
| SVTA02TQ1KPW | Yes | Yes | 20" | 1 µm |
| SVTA02TQ1PW | No | Yes | 20" | 1 µm |
| SVTA03TQ1 | No | No | 30" | 1 µm |
| SVTA0MTQ1 | No | No | 4" | 1 µm |
| SVTA0MTQ1PW | No | Yes | 10" | 1 µm |
| SVTB01TQ1 | No | No | 10" | 5 µm |
| SVTB01TQ1KPW | Yes | Yes | 10" | 5 µm |
| SVTB01TQ1PW | No | Yes | 10" | 5 µm |
| SVTB02TQ1 | No | No | 20" | 5 µm |
| SVTB03TQ1 | No | No | 30" | 5 µm |
| SVTC01TQ1 | No | No | 10" | 10 µm |
| SVTC01TQ1KPW | Yes | Yes | 10" | 10 µm |
| SVTC01TQ1PW | No | Yes | 10" | 10 µm |
| SVTC02TQ1 | No | No | 20" | 10 µm |
| SVTC03TQ1 | No | No | 30" | 10 µm |
| SVTC0MTQ1PW | No | Yes | 4" | 10 µm |
| SVTG01TB1PW | No | Yes | 10" | 0.2 µm |
| SVTG01TQ1 | No | No | 10" | 0.2 µm |
| SVTG01TQ1K | Yes | No | 10" | 0.2 µm |
| SVTG01TQ1KPW | Yes | Yes | 10" | 0.2 µm |
| SVTG01TQ1PW | No | Yes | 10" | 0.2 µm |
| SVTG02TQ1 | No | No | 20" | 0.2 µm |
| SVTG02TQ1KPW | Yes | Yes | 20" | 0.2 µm |
| SVTG02TQ1PW | No | Yes | 20" | 0.2 µm |
| SVTG03TQ1 | No | No | 30" | 0.2 µm |
| SVTG03TQ1PW | No | Yes | 30" | 0.2 µm |
| SVTG0MTQ1 | No | No | 4" | 0.2 µm |
| SVTG0MTQ1PW | No | Yes | 4" | 0.2 µm |
| SVTG73T01 | No | No | 30" | 0.2 µm |
| SVTH01TQ1K | Yes | No | 10" | 0.5 µm |
| SVTH01TQ1KPW | Yes | Yes | 10" | 0.5 µm |
| SVTH01TQ1PW | No | Yes | 10" | 0.5 µm |
| SVTH02TQ1K | Yes | No | 20" | 0.5 µm |
| SVTH02TQ1KPW | Yes | Yes | 20" | 0.5 µm |
| SVTH02TQ1PW | No | Yes | 20" | 0.5 µm |
| SVTH0MTQ1 | No | No | 4" | 0.5 µm |
| SVTH0MTQ1PW | No | Yes | 4" | 0.5 µm |
| SVTV01TQ1 | No | No | 10" | 0.1 µm |
| SVTV01TQ1K | Yes | No | 10" | 0.1 µm |
| SVTV01TQ1KPW | Yes | Yes | 10" | 0.1 µm |
| SVTV01TQ1PW | No | Yes | 10" | 0.1 µm |
| SVTV02TQ1 | No | No | 20" | 0.1 µm |
| SVTV02TQ1K | Yes | No | 20" | 0.1 µm |
| SVTV02TQ1KPW | Yes | Yes | 20" | 0.1 µm |
| SVTV02TQ1PW | No | Yes | 20" | 0.1 µm |
| SVTV03TQ1 | No | No | 30" | 0.1 µm |
| SVTV03TQ1PW | No | Yes | 30" | 0.1 µm |
| SVTV0MTQ1 | No | No | 4" | 0.1 µm |
| SVTV0MTQ1PW | No | Yes | 4" | 0.1 µm |
| SVTY01TQ1 | No | No | 10" | 30 nm |
| SVTY01TQ1K | Yes | No | 10" | 30 nm |
| SVTY02TQ1 | No | No | 20" | 30 nm |
| SVTZ01TQ1 | No | No | 10" | 0.05 µm |
| SVTZ01TQ1K | Yes | No | 10" | 0.05 µm |
| SVTZ01TQ1KPW | Yes | Yes | 10" | 0.05 µm |
| SVTZ01TQ1PW | No | Yes | 10" | 0.05 µm |
| SVTZ02TQ1 | No | No | 20" | 0.05 µm |
| SVTZ02TQ1K | Yes | No | 20" | 0.05 µm |
| SVTZ02TQ1KPW | Yes | Yes | 20" | 0.05 µm |
| SVTZ02TQ1PW | No | Yes | 20" | 0.05 µm |
| SVTZ03TQ1 | No | No | 30" | 0.05 µm |
| SVTZ03TQ1PW | No | Yes | 30" | 0.05 µm |
| SVTZ0MTQ1 | No | No | 4" | 0.05 µm |
| SVTZ0MTQ1PW | No | Yes | 4" | 0.05 µm |